Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.14/46793
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- Title
- Optical surface profilometry of low reflectance materials - evaluation as a laser processing diagnostic
- Related
- Kane, D. M.. Laser cleaning II, p.271-289
- Publisher
- Singapore : World Scientific Publishing
- Date
- 2006
- FoR/RFCD Code(s)
-
020502 Lasers and Quantum Electronics
020504 Photonics, Optoelectronics and Optical Communications
091206 Glass
- Author/Creator
- Kane, D. M
- Author/Creator
- Joyce, A. M
- Author/Creator
- Chater, R. J
- Description
- Optical surface profilometry is a technique that has advantages over other profilometry techniques (stylus profilometry, AFM) of being non-contact and being able to profile comparatively large areas in a single "z-scan". Thus, it is employed in monitoring surface quality and measuring surface form in high technology manufacturing processes and quality assurance, as well as being applied as a diagnostic in research and development contexts. Its application to optical materials has been limited due to issues relating to the low reflectance of the surfaces. A feasibility study for profiling laser induced optical damage and "loose" microscopic sized pieces of optical material (particles introduced by design) on optical substrates is reported. Progress on profiling these difficult samples has been achieved.
- Subject Keyword
- 020502 Lasers and Quantum Electronics
- Subject Keyword
- 020504 Photonics, Optoelectronics and Optical Communications
- Subject Keyword
- 091206 Glass
- Resource Type
- book chapter
- Organisation
- Macquarie University. Dept. of Physics
- Identifier
- http://hdl.handle.net/1959.14/46793
- Identifier
- ISBN:9789812703729
- Identifier
- mq-rm-2006006323
- Language
- eng
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