Optical surface profilometry is a technique that has advantages over other profilometry techniques (stylus profilometry, AFM) of being non-contact and being able to profile comparatively large areas in a single "z-scan". Thus, it is employed in monitoring surface quality and measuring surface form in high technology manufacturing processes and quality assurance, as well as being applied as a diagnostic in research and development contexts. Its application to optical materials has been limited due to issues relating to the low reflectance of the surfaces. A feasibility study for profiling laser induced optical damage and "loose" microscopic sized pieces of optical material (particles introduced by design) on optical substrates is reported. Progress on profiling these difficult samples has been achieved.