High energy laser pulse irradiation of a silica microsphere on a glass surface for sub-micron patterning | Macquarie University ResearchOnline

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Title: High energy laser pulse irradiation of a silica microsphere on a glass surface for sub-micron patterning
Related: International Conference on Nanoscience and Nanotechnology (2006) (3 - 7 July 2006 : Brisbane)
Related: 2006 International conference on nanoscience and nanotechnology : proceedings, p.27-30
DOI: 10.1109/ICONN.2006.340541
Publisher: Piscataway, NJ : IEEE
Date: 2006
Author/Creator: Kane, D. M
Author/Creator: Joyce, A. M
Description: Irradiating silica microspheres, on a silica or glass surface, with single, high-energy, laser pulses from a KrF excimer laser, has generated a wealth of different micron and sub-micron, topological patterns in the substrate. Optical surface profilometry has been used as the experimental technique to study the patterns formed. Comparison of the experimental results with theoretical results from sophisticated models developed by Lukyanchuk and co-workers, and Arnold and co-workers is presented.
Description: 4 page(s)
Subject Keyword: krypton compounds
Subject Keyword: laser materials processing
Subject Keyword: nanopatterning
Subject Keyword: silicon compounds
Resource Type: conference paper
Organisation: Macquarie University. Dept. of Physics

Identifier: http://hdl.handle.net/1959.14/26813
Identifier: ISBN:1424404533
Identifier: mq-rm-2006005777
Language: eng
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