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Femtosecond micromachining of high aspect ratio structures in fused silica using Bessel Beams

Please use this identifier to cite or link to this item: http://hdl.handle.net/1959.14/118870

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Title: Femtosecond micromachining of high aspect ratio structures in fused silica using Bessel Beams
Related: Conference on Lasers and Electro-optics Europe (14 - 19 June 2009 : Munich)
Related: CLEO Europe-EQEC 2009 : European Conference on Lasers and Electro-Optics 2009, and the European Quantum Electronics Conference :14-19 June, 2009, Munich, Germany, p.1-1
DOI: 10.1109/CLEOE-EQEC.2009.5192163
Publisher: Piscataway, N.J : IEEE
Date: 2009
FoR/RFCD Code(s): 020500 Optical Physics
Author/Creator: Bhuyan, M. K
Author/Creator: Courvoisier, F
Author/Creator: Lacourt, P.-A
Author/Creator: Jacquot, M
Author/Creator: Furfaro, L
Author/Creator: Withford, M. J
Author/Creator: Dudley, J. M
Description: Femtosecond laser micromachining is a laser processing technology with proven potential for the fabrication of a wide range of photonic devices. In the context of developing integrated components for microfluidics, a key issue is the machining of high aspect ratio micro and nano-channels, and the use of diffraction-free Bessel beams for this purpose has attracted much attention. However, although Bessel beams possess several attractive characteristics for this purpose, we show here that their practical use for high aspect ratio micromachining requires a careful selection of focussing and pump laser parameters. We report results of a systematic study of Bessel beam micromachining of structures of diameter < 5 mum in fused silica, and we describe conditions under which high quality and high aspect ratio structures can be reproducibly obtained. Within the parameter regimes identified here, Bessel beams present quantitative advantages when compared to diffractive Gaussian beams, especially for the drilling of channels of sub-10 mum diameter. Outside this parameter regime, there is little benefit in the Bessel beam approach.
Description: 1 page(s)
Subject Keyword: 020500 Optical Physics
Resource Type: conference paper
Organisation: Macquarie University. Dept. of Physics and Engineering

Identifier: http://hdl.handle.net/1959.14/118870
Identifier: ISBN:9781424440801
Identifier: mq-rm-2009004537
Language: eng
Rights: Copyright 2009 IEEE. Reprinted from CLEO Europe-EQEC 2009 : European Conference on Lasers and Electro-Optics 2009, and the European Quantum Electronics Conference :14-19 June, 2009, Munich, Germany. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Macquarie University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
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